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INVESTIGATION OF N SINGLE ATOM AND DIATOM DOPANT GAS EFFECT ON THE CONDUCTIVITY OF NITROGEN-DOPED ZNO THIN FILMS GROWN BY THERMAL EVAPORATION PROCESS
Mu, Wei
2009, Master of Science, Miami University, Paper Science and Engineering.
This thesis focuses on the study of nitrogen doped p-type ZnO. The ZnO film is grown by thermal evaporation process in a tube furnace. Two processes and two nitrogen precursors are studied for nitrogen doping. The result shows the p-type ZnO:N films were formed by thermal evaporation for the first time. The Extended X-Ray Absorption of Fine Structure (EXAFS) study indicates that N atoms are not only substitute the O atom directly. But some of them participate in N–N bonding. A reduction in electrical performance is observed for ZnO:N using 5% NO/N2 as dopant gas. This is probably due to the presence of more N-N diatoms in the film. The film conductivity depends not only on the dopant gas but also on the growth and annealing process. The photoluminence study indicates the correlation between optical property and conductivity.
Lei Kerr, PhD (Advisor)
Shashi Lalvani, PhD (Committee Member)
Steven Keller, PhD (Committee Member)
48 p.
Chemical Engineering

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Mu, W. (2009). INVESTIGATION OF N SINGLE ATOM AND DIATOM DOPANT GAS EFFECT ON THE CONDUCTIVITY OF NITROGEN-DOPED ZNO THIN FILMS GROWN BY THERMAL EVAPORATION PROCESS. (Electronic Thesis or Dissertation). Retrieved from https://etd.ohiolink.edu/

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Mu, Wei. "INVESTIGATION OF N SINGLE ATOM AND DIATOM DOPANT GAS EFFECT ON THE CONDUCTIVITY OF NITROGEN-DOPED ZNO THIN FILMS GROWN BY THERMAL EVAPORATION PROCESS." Electronic Thesis or Dissertation. Miami University, 2009. OhioLINK Electronic Theses and Dissertations Center. 20 Jun 2018.

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Mu, Wei "INVESTIGATION OF N SINGLE ATOM AND DIATOM DOPANT GAS EFFECT ON THE CONDUCTIVITY OF NITROGEN-DOPED ZNO THIN FILMS GROWN BY THERMAL EVAPORATION PROCESS." Electronic Thesis or Dissertation. Miami University, 2009. https://etd.ohiolink.edu/

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