Doctor of Philosophy, The Ohio State University, 2023, Materials Science and Engineering
Beta-gallium oxide (β-Ga2O3) has emerged as a highly promising ultrawide bandgap semiconductor with unique advantages, capturing significant attention. The presence of point and extended defects in β-Ga2O3 plays a crucial role in shaping the performance of devices based on this material, as they can either decrease or increase the net doping. However, the field has been lacking direct and detailed experimental information about the atomic-level structure of these defects. Bridging this knowledge gap is crucial to establish connections between the measured material properties and the observed atomic structure of defects in β-Ga2O3. To address this, atomic scale scanning transmission electron microscopy (STEM) was employed in this research to investigate the formation and impact of point and extended defects in β-Ga2O3. In the earlier works, we have used quantitative analysis of atomic and nanoscale defects from STEM images to understand the formation of various types of defects in β-Ga2O3, such as interstitial-divacancy complexes and planar defects. Furthermore, phase transformations in (AlxGa1−x)2O3, directly correlating them with Al incorporation into the lattice, were also extensively studied. Based on the findings, we began to tackle bigger scientific questions regarding the fundamental atomic scale mechanisms driving the phase transition from the β phase to the γ phase in Ga2O3. Additionally, it was also required to gain a deeper understanding of the effects of defect incorporation, such as by Sn doping, Al alloying, Si ion implantation, and Ir metal diffusion, on this phase transformation process. In order to address these questions, an atomic scale investigation was conducted to examine the effect of ion implantation on β-Ga2O3 materials, aiming to unravel the atomic scale mechanism behind structural changes, lattice relaxation, and phase transformation in Si-implanted β- Ga2O3 as a function of Si dose. Furthermore, by combining the secondary ion mass spectrom (open full item for complete abstract)
Committee: Jinwoo Hwang (Advisor); Ezekiel Johnston-Halperin (Committee Member); Siddharth Rajan (Committee Member); Hongping Zhao (Committee Member)
Subjects: Materials Science