Doctor of Philosophy (Ph.D.), Bowling Green State University, 2021, Photochemical Sciences
Transparent Semiconducting oxides (TSO) belong to a special group of wide bandgap oxide materials that have high optical transmittance and high conductivity at the same time. Wide bandgap semiconductors are extremely important for their use in numerous electronic/ optoelectronic devices including MOSFETs, Photo diodes, solar cell, LED, Laser diode, sensors, etc. Recently, wide bandgap oxide materials, especially Ga2O3 have attracted a great deal of attention from the scientific community. β-Ga2O3 is the most stable polymorphs of Ga2O3 with an ultra-wide bandgap of 4.9 eV, high breakdown voltage, and high Baliga's Figure of Merit (BFM) that make it an ideal candidate for the next generation high power devices. A comprehensive study of material properties of β-Ga2O3 is needed to fabricate high-performance devices. Unfortunately, our understanding of β-Ga2O3 as a semiconductor material is not comprehensive. Point defects (e.g., Cation or anion vacancies, interstitials, etc.) that significantly affect the electrical and optical properties of this material are not yet fully understood. Proper understanding, characterizing and modification of defects can lead to its application in semiconductor-based devices. Moreover, finding suitable donors and acceptors for β-Ga2O3 to tune its electrical conductivity is crucial for its use in electronic devices. In this thesis, different aspects of β-Ga2O3 are addressed as a semiconductor material. We have studied optical, electrical, and structural properties of β-Ga2O3 single crystals and epitaxial thin films grown by several techniques. Major point defects in β-Ga2O3 were investigated using several novel techniques. We have identified and characterized major electronic traps and investigated their effects on the optical, structural, and electrical properties of β-Ga2O3. We discovered an innovative way to dope β-Ga2O3 providing high free carrier density and good mobility while maintaining low defect concentration. A novel spectromete (open full item for complete abstract)
Committee: Farida Selim Ph.D. (Advisor); Amelia Carr Ph.D. (Other); Alexander Tarnovsky Ph.D. (Committee Member); Alexey Zayak Ph.D. (Committee Member)
Subjects: Chemistry; Materials Science; Physics