Doctor of Philosophy, University of Toledo, 2017, Physics
Spectroscopic ellipsometry (SE) is a powerful tool to characterize multilayered thin films, providing structural parameters and materials optical properties over a wide spectral range. Further analyses of these optical properties can provide additional information of interest on the physical and chemical properties of materials. In-situ real time SE (RTSE) combines high surface sensitivity with fast data acquisition and non-destructive probing, thus lends insights into the dynamics of film growth. In this dissertation, the methods of SE have been applied to investigate the growth and properties of material components used in the CIGS thin film photovoltaic technology. Examples of RTSE data collection and analyses are demonstrated for the growth of selenium (Se), molybdenum diselenide (MoSe2) and copper selenide (Cu2-xSe), used in CIGS technology which can then be applied in complete analysis of three-stage CIGS deposition by co-evaporation.
Thin film Mo deposited by sputtering is the most widely used back contact for solar cells using CIGS absorbers. In this study, in-situ and real time characterization have been utilized in order to investigate the growth as well as the structural, optical, and electronic properties of Mo thin films deposited by DC magnetron sputtering at different substrate temperatures. In these studies, the surface roughness on the Mo is observed to decrease with increasing substrate temperature. The growth rate, nucleation behavior, evolution of surface roughness and development of void structures in Mo show strong variations with deposition temperature. In depth analyses of (e1, e2) provide consistent estimates of void fraction, excited carrier mean free path, group speeds of excited carriers and intrinsic stress in the films. Complementary ex-situ characterization of the as deposited Mo films included XRD, resistivity measurements by four-point-probe, SEM, and profilometry.
This dissertation describes the research performed on the (In (open full item for complete abstract)
Committee: Robert Collins (Committee Chair); Nikolas J. Podraza (Committee Member); Bo Gao (Committee Member); Jacques G. Amar (Committee Member); Dean M. Giolando (Committee Member)
Subjects: Materials Science; Physics; Solid State Physics