PhD, University of Cincinnati, 2015, Engineering and Applied Science: Mechanical Engineering
This dissertation presents the fabrication and testing of a new design of an electro-osmotic flow (EOF) driven micro-pump. Considering thermal management applications, three different types of micro-pumps were tested using multiple liquids. The micro-pumps were fabricated from a combination of materials, which included: silicon-polydimethylsiloxane (Si-PDMS), Glass-PDMS, or PDMS-PDMS. The flow rates of the micro-pumps were experimentally and numerically assessed. Different combinations of materials and liquids resulted in variable values of zeta-potential. The ranges of zeta-potential for Si-PDMS, Glass-PDMS, and PDMS-PDMS were –42.5 to –50.7 mV, –76.0 to –88.2 mV, and –76.0 to –103.0 mV, respectively. The flow rates of the micro-pumps were proportional to their zeta-potential values. In particular, flow rate values were found to be linearly proportional to the applied voltages below 500 V. A maximum flow rate of 75.9 µL/min was achieved for the Glass-PDMS micro-pump at 1 kV. At higher voltages non-linearity and reduction in flow rate occurred due to Joule heating and the axial electro-osmotic current leakage through the silicon substrate. The fabricated micro-pumps could deliver flow rates, which were orders of magnitude higher compared to the previously reported values for similar size micro-pumps. It is expected that such an increase in flow rate, particularly in the case of the Si-PDMS micro-pump, would lead to enhanced heat transfer for micro-chip cooling applications as well as for applications involving micro-total analysis systems.
The Si-PDMS micro-pump was modified to be used as a micro-scale heat exchanger for the thermal management of hot spots generated by microchips. Various cooling liquids including, deionized water, distilled water, borax buffer, and Al2O3 nano-particle solution, were tested and compared based on their flow rates and the increase in the temperature of the cooling liquid. A constant heat flux heater wa (open full item for complete abstract)
Committee: Rupak Banerjee Ph.D P.E. (Committee Chair); Sabyasachi Ganguli Ph.D. (Committee Member); Ajit Roy Ph.D. (Committee Member); Michael Kazmierczak Ph.D. (Committee Member); Teik Lim Ph.D. (Committee Member)
Subjects: Mechanics