Doctor of Philosophy (Ph.D.), University of Dayton, 2023, Electrical Engineering
Doping of metal oxide semiconductors with other metal oxides or metal ions is an
effective way to improve the sensing performance of gas sensors. In this dissertation, In-doped SnO2 thin film is used in different gas sensing platforms, such as surface acoustic
wave (SAW) transducers and impedance spectroscopy, for the detection of volatile organic
vapors at room temperature. The properties of the piezoelectric materials play a critical
role in determining the sensing response of the SAW based gas sensors. Recently, various
ferroelectric materials have been used as piezoelectric materials in the manufacturing of
SAW based gas sensors. Among them, Ba0.6Sr0.4TiO3 (BST) has emerged as a potential
candidate due to its high acoustic velocity and electromechanical coupling coefficient. In
the development of gas sensors, noble metals are extensively used as electrode or
transducer materials. However, noble metals are expensive and scarce. On the basis of their
favorable electrical conductivity, 2D metallic transition-metal dichalcogenides (VTe2,
NbTe2, and TaTe2) are emerging as promising candidates for use in 2D electronic devices.
In this dissertation, the design, fabrication, and validation of BST-based SAW and NbTe2-
based impedance spectroscopy sensor platforms with the In-doped SnO2 sensing film were
demonstrated. Different deposition and photolithography techniques were applied to
fabricate the sensors. The morphology, structural, elemental compositions, and electrical
properties of the as-deposited samples were characterized by HRSEM, XRD, EDS, and the
four-point probe sheet resistance method. The samples exhibited excellent film adhesion.
Furthermore, the sensing performances of the SAW and impedance spectroscopy-based
gas sensors towards ethanol and humidity were evaluated at room temperature. The SAW
sensors exhibited a significant negative frequency shift, which can be attributed to the mass
and electric loading effects o (open full item for complete abstract)
Committee: Guru Subramanyam (Advisor)
Subjects: Electrical Engineering; Materials Science; Nanotechnology