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Microstructural and Optical Properties of Sputter-Deposited Ga2O3 Films

Vega Lozada, Eduardo
http://rave.ohiolink.edu/etdc/view?acc_num=ysu1714233416461085

Abstract Details

2024, Doctor of Philosophy in Materials Science and Engineering, Youngstown State University, Materials Science.
Semiconductor materials have played a huge role in advancing today’s technology through the electronic and photonic devices ushered in over the years. The advancement has been driven in part by society’s growing need for electronic devices capable of handling higher power, higher temperature, and higher frequency. Current research efforts are expanding to ultra-wide bandgap semiconductors such as gallium oxide Ga2O3). The principal goal of this dissertation is to obtain high quality β-Ga2O3 films with controlled conductivity by magnetron sputtering deposition. The specific objectives are the following: To grow β-Ga2O3 films on sapphire substrates (section 5.2) and on native β-Ga2O3 by rf sputtering (section 5.3), to produce doped and undoped β-Ga2O3 films (Section 5.4). Additionally, to grow Lu2O3/ Ga2O3 and B2O3/Ga2O3 alloy films on (-2 0 1) UID or Sn-doped Ga2O3 and Al2O3 substrates to tune Ga2O3 original bandgap (Section 5.5). To obtain microstructural, morphological, compositional, and optical data from XRD, AFM, SEM, EDS, and UV-Vis characterization methods for all the experiments mentioned above. From this data, correlate the effects of the varying parameters for the optimization of the films, to use the developed films to fabricate Schottky barrier diodes and proceed with the electrical characterization of the fabricated devices (section 5.6).
Tom Oder, PhD (Advisor)
Clovis Linkous, PhD (Committee Member)
Constantin Solomon, PhD (Committee Member)
Michael Crescimanno, PhD (Committee Member)
Donald Priour, PhD (Committee Member)
316 p.
Electrical Engineering; Engineering; Experiments; Materials Science; Optics; Physics; Technology
ultra-wide bandgap; gallium oxide; rf magnetron sputtering; thin films; oxides; doping; alloys; Schottky barrier diode; materials science; engineering; power electronics; semiconductor; SEM; EDS; XRD; UV-Vis; bandgap engineering; optoelectronics; physical deposition

Recommended Citations

Citations

  • Vega Lozada, E. (2024). Microstructural and Optical Properties of Sputter-Deposited Ga2O3 Films [Doctoral dissertation, Youngstown State University]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=ysu1714233416461085

    APA Style (7th edition)

  • Vega Lozada, Eduardo. Microstructural and Optical Properties of Sputter-Deposited Ga2O3 Films. 2024. Youngstown State University, Doctoral dissertation. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=ysu1714233416461085.

    MLA Style (8th edition)

  • Vega Lozada, Eduardo. "Microstructural and Optical Properties of Sputter-Deposited Ga2O3 Films." Doctoral dissertation, Youngstown State University, 2024. http://rave.ohiolink.edu/etdc/view?acc_num=ysu1714233416461085

    Chicago Manual of Style (17th edition)

ysu1714233416461085
186
© 2024, all rights reserved.
This open access ETD is published by Youngstown State University and OhioLINK.