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Metal-Semiconductor Contacts for Schottky Diode Fabrication

Barlow, Mark Donald
http://rave.ohiolink.edu/etdc/view?acc_num=ysu1198114671

Abstract Details

2007, Master of Science in Engineering, Youngstown State University, Department of Electrical and Computer Engineering.
This research demonstrates several methods to produce high voltage Schottky contact diodes. How contact construction and process temperatures affect turn-on voltage Schottky barrier height, on-resistance, and reverse breakdown voltage are studied. The performance of varied contact terminal construction types and temperature processes used to fabricate Schottky diodes were evaluated. The diodes are constructed of nickel metal mechanical (pressure) contacts and plasma sputter deposited nickel metal contacts on silicon carbide (SiC). Current-voltage characterizations were used to study the differences in performance verses geometric construction types, sputter deposition temperature, and annealing temperatures. The configurations studied were needle points, spheres, and planar metal-semiconductor contacts varying in interface areas that ranged from 0.58*10-4 to 6.2*10-4 cm2. Planar Schottky contacts 500 μm in diameter sputter deposited at 27C and 600C are exposed to a range of temperatures in ultra pure nitrogen atmosphere. These Schottky contacts were studied to gain insight into mechanical contacts, plasma sputter deposited contacts, and temperature processes.
Frank Li (Advisor)
88 p.
Schottky diodes; high voltage Schottky contacts; mechanical contacts; plasma sputter deposit contacts; silicon carbide; high temperature process; diode fabrication

Recommended Citations

Citations

  • Barlow, M. D. (2007). Metal-Semiconductor Contacts for Schottky Diode Fabrication [Master's thesis, Youngstown State University]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=ysu1198114671

    APA Style (7th edition)

  • Barlow, Mark. Metal-Semiconductor Contacts for Schottky Diode Fabrication. 2007. Youngstown State University, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=ysu1198114671.

    MLA Style (8th edition)

  • Barlow, Mark. "Metal-Semiconductor Contacts for Schottky Diode Fabrication." Master's thesis, Youngstown State University, 2007. http://rave.ohiolink.edu/etdc/view?acc_num=ysu1198114671

    Chicago Manual of Style (17th edition)

ysu1198114671
4,209
© 2007, all rights reserved.
This open access ETD is published by Youngstown State University and OhioLINK.
Release 3.2.12