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Chemo-Thermal Micromachining of Glass: An Explorative Study

Ali, Arham
http://rave.ohiolink.edu/etdc/view?acc_num=ucin154392221273875

Abstract Details

2018, MS, University of Cincinnati, Engineering and Applied Science: Mechanical Engineering.
Engineering materials such as glass and ceramics are finding numerous applications in electronics and communication, optics, chemical, aerospace, and medical industries. Glass being a hard and brittle material poses huge machining challenges especially during micromachining. Traditional machining of glass by methods such as drilling or milling is generally difficult to achieve due to reasons ranging from excessive tool wear to abrupt breakage of glass. Chemical etching techniques can produce a smooth machined surface on glass. Yet, the chemical machining process is usually slow and often fail to produce high aspect ratio unless combined with some other additional masking techniques which are usually expensive. Laser beam machining when performed on glass produces micro-cracks along the machined edge due to uneven temperature distribution and residual stresses due to heat affected zones (HAZ). Wet laser beam machining, i.e. laser beam machining when performed under water instead of air results in considerable reduction in thermal defects. However, a portion of laser energy is wasted in wet laser machining as heat loss in water. The motivation of this study is to use to minimize this loss and explore the possibility of utilizing this laser energy being absorbed by the medium to further increase machining. To achieve this, a novel chemo-thermal machining process is proposed in this work. Chemo-thermal micromachining is a laser beam machining process in wet condition where laser beam machining is performed on glass specimen submerged in NaOH solution. Material removal mechanism in chemo-thermal micromachining process is a combination of laser ablation and chemical machining. When laser beam is incident on glass workpiece submerged under NaOH solution, a part of laser energy is absorbed by the electrolyte solution iii thus raising the electrolyte temperature locally thus increasing the rate of chemical reaction as chemical machining process is highly dependent on temperature. The feasibility of the process was studied, and it was found that there was a considerable reduction in the micro-cracks formed along the machine surface. When laser beam machining on glass was performed in air about 20-23 micro-cracks were observed which were reduced to 1-5 when machining was performed using chemo-thermal process. Also, the average length of cracks was reduced by about 90%. The effect of machining parameters on material removal rate (MRR) and surface quality that involves surface cracks and built-up edges along the machine surface was further studied using a four-level full factorial experimental design. A finite element model was created and the chemo-thermal process was simulated to predict the material removal on borosilicate glass. The predictions made by the simulation were compared with the experimental results and the variations were found to be within 5%.
Murali Sundaram, Ph.D. (Committee Chair)
Woo Kyun Kim, Ph.D. (Committee Member)
Jing Shi, Ph.D. (Committee Member)
Matthew Steiner, Ph.D. (Committee Member)
74 p.
Mechanical Engineering
Glass; Hybrid Machining; Micromachining; Laser; Chemical Machining

Recommended Citations

Citations

  • Ali, A. (2018). Chemo-Thermal Micromachining of Glass: An Explorative Study [Master's thesis, University of Cincinnati]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=ucin154392221273875

    APA Style (7th edition)

  • Ali, Arham. Chemo-Thermal Micromachining of Glass: An Explorative Study. 2018. University of Cincinnati, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=ucin154392221273875.

    MLA Style (8th edition)

  • Ali, Arham. "Chemo-Thermal Micromachining of Glass: An Explorative Study." Master's thesis, University of Cincinnati, 2018. http://rave.ohiolink.edu/etdc/view?acc_num=ucin154392221273875

    Chicago Manual of Style (17th edition)

ucin154392221273875
249
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This open access ETD is published by University of Cincinnati and OhioLINK.
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