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Catalyst Immobilization for Patterned Growth of Carbon Nanotubes

Vishnubhatla Kapil, Bharadwaj
http://rave.ohiolink.edu/etdc/view?acc_num=ucin1282053821

Abstract Details

2010, MS, University of Cincinnati, Engineering and Applied Science: Electrical Engineering.
Carbon nanotubes have excellent electrical and mechanical properties, which are ideally suited for field emission and sensor/actuator applications. The catalyst layer needed for CNT growth (Fe, Ni or Co) once coated on the substrate is subject to an annealing step, which results in the formation of tiny globules of randomly aligned particles. CNTs finally grow on these randomly placed catalyst particles after the substrate annealing. The disadvantage of the bottom-up approach is that the catalyst globules are susceptible to migration on the substrate during thermal annealing and the CNT growth process. The scope of this thesis includes: (1) Patterning arrays of nano-/micro- features by e-beam lithography, (2) shallow etches of the holes by plasma etching in these features (3) deposition of the catalyst material into the shallow holes, (4) CNT growth, and (5) characterization of the patterned nano/micro-scale CNT catalysts and CNT growth. The main objective in this thesis is to immobilize the catalysts on the substrate at a specific location with an array of shallow holes. We believe this will localize and anchor the catalyst producing patterned arrays of CNT’s. This method process will also be compared with the current methods of catalyst immobilization developed by Dr. Shanov’s group where an alumina layers acts as the catalyst anchor layer. Also CNT growth is compared and with a substrate with no immobilization of the catalyst. The differences in catalyst morphology between annealing the substrate in air and nitrogen will also be compared. All the comparisons are done across different diameters of patterned features on the substrate. This new process will allow for the controlled patterning of CNT growth and enable CNT’s to be integrated into manufacture able devices.
Marc Cahay, PhD (Committee Chair)
Vesselin Shanov, PhD (Committee Member)
Robert Jones, PhD (Committee Member)
143 p.
Materials Science
Carbon Nanotubes; Carbon Nanotube Catalyst; Catalyst Immobilization; Patterned Carbon Nanotubes

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Citations

  • Vishnubhatla Kapil, B. (2010). Catalyst Immobilization for Patterned Growth of Carbon Nanotubes [Master's thesis, University of Cincinnati]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1282053821

    APA Style (7th edition)

  • Vishnubhatla Kapil, Bharadwaj. Catalyst Immobilization for Patterned Growth of Carbon Nanotubes. 2010. University of Cincinnati, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=ucin1282053821.

    MLA Style (8th edition)

  • Vishnubhatla Kapil, Bharadwaj. "Catalyst Immobilization for Patterned Growth of Carbon Nanotubes." Master's thesis, University of Cincinnati, 2010. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1282053821

    Chicago Manual of Style (17th edition)

ucin1282053821
385
© 2010, some rights reserved.Creative Commons License Catalyst Immobilization for Patterned Growth of Carbon Nanotubes by Bharadwaj Vishnubhatla Kapil is licensed under a Creative Commons Attribution-NonCommercial-NoDerivs 3.0 Unported License. Based on a work at etd.ohiolink.edu.
This open access ETD is published by University of Cincinnati and OhioLINK.