Skip to Main Content
 

Global Search Box

 
 
 
 

Files

File List


b59670447.pdf (11.62 MB)

ETD Abstract Container

Abstract Header

Surface modification of silicon and PDMS surfaces with vapor phase deposited ultrathin fluoropolymer and fluorosilane films for biomedical micro/nanoelectromechanical system applications /

Lee, Kang Kug
http://rave.ohiolink.edu/etdc/view?acc_num=osu1727951977586911

Abstract Details

2005, Master of Science, Ohio State University, Graduate School.
Not Provided (Other)
Thin films; Vapor-plating.; Fluoropolymers; Microfabrication.;

Recommended Citations

Citations

  • Lee, K. K. (2005). Surface modification of silicon and PDMS surfaces with vapor phase deposited ultrathin fluoropolymer and fluorosilane films for biomedical micro/nanoelectromechanical system applications / [Master's thesis, Ohio State University]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=osu1727951977586911

    APA Style (7th edition)

  • Lee, Kang. Surface modification of silicon and PDMS surfaces with vapor phase deposited ultrathin fluoropolymer and fluorosilane films for biomedical micro/nanoelectromechanical system applications /. 2005. Ohio State University, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=osu1727951977586911.

    MLA Style (8th edition)

  • Lee, Kang. "Surface modification of silicon and PDMS surfaces with vapor phase deposited ultrathin fluoropolymer and fluorosilane films for biomedical micro/nanoelectromechanical system applications /." Master's thesis, Ohio State University, 2005. http://rave.ohiolink.edu/etdc/view?acc_num=osu1727951977586911

    Chicago Manual of Style (17th edition)

osu1727951977586911
27
This document is provided by The Ohio State University for research and educational purposes, and may be under copyright by the author or the author's heirs. Please contact the ETD Center administrator at The Ohio State University gsetd@gradsch.ohio-state.edu with any questions or comments. In your email, be sure to include the URL and title of the specific items you are inquiring about.
This open access ETD is published by The Ohio State University and OhioLINK.