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Design and Finite Element Modeling of a MEMS‐scale Aluminum Nitride (AlN) Energy Harvester with Meander Spring Feature

Zula, Daniel Peter
http://rave.ohiolink.edu/etdc/view?acc_num=case1560261406397638

Abstract Details

2019, Master of Sciences (Engineering), Case Western Reserve University, EECS - Electrical Engineering.
AlN is in an attractive piezoelectric material for energy harvesting, as it is compatible with Integrated Circuit (IC) CMOS fabrication and MEMS (micro‐electromechanical systems). Its material compatibility permits easier industrialization and integration with SOCs (systems‐on‐a‐chip). However, due to feature size and material properties, state‐of‐theart MEMS‐scale AlN harvesters typically have natural frequencies above 200 Hz, preventing useable power output in applications with lower frequency power spectra. In this thesis, finite element analysis was used to explore whether meandering‐spring device geometry could lower the natural frequencies of MEMS‐based energy harvesters. ANSYS® Mechanical™ was used for design and modeling, and Sandia Lab’s RF MEMS process provided input for process parameters. For a 5x6 mm AlN vibration harvester, this work showed that one pair of meanders was sufficient for producing a natural frequency below 200 Hz, and that by adding additional meanders, a natural frequency of 29.9 Hz was possible.
Christian Zorman, Dr. (Committee Chair)
Francis Merat, Dr. (Committee Member)
Michael Fu, Dr. (Committee Member)
140 p.
Electrical Engineering
MEMS, Aluminum Nitride, AlN, Vibration, Energy, Harvesting, Meander, Spring, ANSYS, FEA, FEM, Modal, Natural Frequency, CMOS, Sandia

Recommended Citations

Citations

  • Zula, D. P. (2019). Design and Finite Element Modeling of a MEMS‐scale Aluminum Nitride (AlN) Energy Harvester with Meander Spring Feature [Master's thesis, Case Western Reserve University]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=case1560261406397638

    APA Style (7th edition)

  • Zula, Daniel. Design and Finite Element Modeling of a MEMS‐scale Aluminum Nitride (AlN) Energy Harvester with Meander Spring Feature. 2019. Case Western Reserve University, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=case1560261406397638.

    MLA Style (8th edition)

  • Zula, Daniel. "Design and Finite Element Modeling of a MEMS‐scale Aluminum Nitride (AlN) Energy Harvester with Meander Spring Feature." Master's thesis, Case Western Reserve University, 2019. http://rave.ohiolink.edu/etdc/view?acc_num=case1560261406397638

    Chicago Manual of Style (17th edition)

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This open access ETD is published by Case Western Reserve University School of Graduate Studies and OhioLINK.