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Investigation of N Single Atom and Diatom Dopant Gas Effect on the Conductivity of Nitrogen-Doped Zno Thin Films Grown by Thermal Evaporation Process

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Degree
Master of Science, Miami University, Paper Science and Engineering, .
Abstract
This thesis focuses on the study of nitrogen doped p-type ZnO. The ZnO film is grown by thermal evaporation process in a tube furnace. Two processes and two nitrogen precursors are studied for nitrogen doping. The result shows the p-type ZnO:N films were formed by thermal evaporation for the first time. The Extended X-Ray Absorption of Fine Structure (EXAFS) study indicates that N atoms are not only substitute the O atom directly. But some of them participate in N–N bonding. A reduction in electrical performance is observed for ZnO:N using 5% NO/N2 as dopant gas. This is probably due to the presence of more N-N diatoms in the film. The film conductivity depends not only on the dopant gas but also on the growth and annealing process. The photoluminence study indicates the correlation between optical property and conductivity.
Subject Headings
Chemical engineering
Keywords
p-type; ZnO; thermal evaporation; nanostructure
Committee / Advisors
Lei Kerr, PhD (Advisor)
Shashi Lalvani, PhD (Committee Member)
Steven Keller, PhD (Committee Member)
Pages
48p.

Document number: miami1250195098
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