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X-ray absorption fine structure strain determination in thin films

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Degree
Doctor of Philosophy, Case Western Reserve University, Physics, .
Abstract
X-ray Absorption Fine Structure (XAFS) spectroscopy was examined, for the first time, as a technique for the determination of elastic strain in thin evaporated films and thin foils. The electron yield and fluorescence yield detection techniques were used to collect the XAFS data. For sensitivity reasons, back-reflection X-Ray Diffraction (XRD) was also carried out. Continuum mechanics was used to model the deformation of the first shell and was compared to experimental observations. A local, non-linear elastic strain was observed by XAFS and is the same quantity measured by XRD. In general, the measured magnitude of the XAFS strain was found to be less than the model predicts, and relaxation of the stress in the substrate or the foil is suggested as the responsible mechanism.
Subject Headings
Physics, Condensed Matter
Keywords
X-ray absorption fine structure (XAFS); Thin films
Advisor
R. W. Hoffman
Pages
204p.

Document number: case1060005230
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